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Conferences > CLEO_SI > 2012 > CF1L > CF1L.8

Tabletop Reflection Mode Coherent Diffractive Imaging of Periodic Nano-Structures with 100 nm Resolution

Matthew D. Seaberg, Daniel E. Adams, Bosheng Zhang, Margaret M. Murnane, and Henry C. Kapteyn

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Abstract

We report the first reflection-mode coherent diffraction imaging using a tabletop short wavelength light source. A novel imaging scheme can probe metalic nano-pillar arrays with ~100 nm resolution.

© 2012 Optical Society of America

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