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A MEMS Controlled Cavity Optomechanical Sensing System

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Abstract

We report a fully-integrated MEMS sensing platform enabled by cavity optomechanics. We demonstrate 4.6 fm/Hz1/2 displacement sensitivity for sub-µW input power, electrostatically-tunable readout gain, and feedback damping of mechanical response by a factor of >1000.

© 2012 Optical Society of America

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