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Conferences > CLEO_SI > 2012 > CTu2J > CTu2J.4

Selective-Area Growth of Ge and Ge/SiGe Quantum Wells in 3 μm Silicon-on-Insulator Waveguides

Stephanie A. Claussen, Krishna C. Balram, Edward T. Fei, Theodore I. Kamins, James S. Harris, and David A. B. Miller

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Abstract

We demonstrate a robust process for growing high-quality bulk Ge and Ge/SiGe quantum wells in selected areas of 3 μm thick silicon-on-insulator waveguides, eliminating sidewall growth and hence facilitating low-insertion-loss optical modulators.

© 2012 Optical Society of America

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