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Conferences > CLEO_SI > 2012 > CW1M > CW1M.4

GHz Optomechanical Wheel and Disk Resonators with High Mechanical Q Factors in Air

Xiankai Sun, Xufeng Zhang, King Y. Fong, Chi Xiong, Wolfram H. P. Pernice, and Hong X. Tang

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Abstract

Wheel- and disk-shaped Si optomechanical resonators are demonstrated with frequency up to 1.75 GHz and mechanical Q factors as high as 4370 at 1.41 GHz measured in air. Displacement sensitivity of 4.16×10−17 m/Hz1/2 is achieved.

© 2012 Optical Society of America

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