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Conferences > CLEO_SI > 2013 > CTu1F > CTu1F.3

High-QLithium Niobate Microring-Resonators on Silicon

Payam Rabiei, Jichi Ma, Jeff Chiles, Saeed Khan, and Sasan Fathpour

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Abstract

Submicron lithium niobate waveguides and resonators are demonstrated on silicon by a novel and reliable ion implantation and wafer bonding technique. Waveguide ridges are formed by selective oxidation of tantalum to avoid etching lithium niobate.

© 2013 Optical Society of America

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