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Conferences > CLEO_SI > 2013 > CTu2F > CTu2F.5

Deposited low temperature silicon GHz modulator

Yoon Ho Daniel Lee, Michael O. Thompson, and Michal Lipson

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Abstract

We demonstrate multi gigahertz polysilicon electro-optic modulator fabricated using low temperature excimer laser annealing technique compatible with CMOS backend integration. Carrier injection modulation at 3 Gbps is achieved.

© 2013 Optical Society of America

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