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A superhigh-frequency optoelectromechanical system based on a slotted photonic crystal cavity

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Abstract

We develop an all-integrated optoelectromechanical system that operates up to 4.20 GHz. The in-plane bulk acoustic modes of a photonic crystal membrane are electrocapacitively actuated and optically detected by a high-Q slotted photonic crystal cavity.

© 2013 Optical Society of America

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