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Real-Time Depth Monitoring of Galvo-telecentric Laser Machining by Inline Coherent Imaging

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Abstract

We achieve in situ, micron-scale tracking of laser machining through a galvo-telecentric beam delivery system using coherent imaging. We collect both high speed intrapulse and interpulse morphology changes as well as overall sweep-to-sweep depth penetration.

© 2013 Optical Society of America

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