Photonic Crystal Cavities in Cubic Silicon Carbide

Marina Radulaski; Sonia Buckley; Linda Zhang; Armand Rundquist; Thomas M. Babinec; J Provine; Kassem Al Assaad; Gabriel Ferro; Jelena Vučković

doi:10.1364/CLEO_SI.2014.SM4M.4

CLEO: 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper SM4M.4
•https://doi.org/10.1364/CLEO_SI.2014.SM4M.4

Photonic Crystal Cavities in Cubic Silicon Carbide

Marina Radulaski, Sonia Buckley, Linda Zhang, Armand Rundquist, Thomas M. Babinec, J Provine, Kassem Al Assaad, Gabriel Ferro, and Jelena Vučković

CLEO: Science and Innovations 2014

San Jose, California United States
8–13 June 2014
ISBN: 978-1-55752-999-2

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Photonic Crystals (SM4M)

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M. Radulaski, S. Buckley, L. Zhang, A. Rundquist, T. M. Babinec, J. Provine, K. Al Assaad, G. Ferro, and J. Vučković, "Photonic Crystal Cavities in Cubic Silicon Carbide," in CLEO: 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper SM4M.4.

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Abstract

We present high quality factor (Q ∼ 10³) photonic crystal cavities in cubic silicon carbide (3C-SiC) films grown directly on silicon. We show results in shifted-L3 and nanobeam cavity geometries for applications in nonlinear and quantum photonics.

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