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AFM-Based Pick-and-Place Handling of Individual Nanoparticles inside an SEM for the Fabrication of Plasmonic Nano-Patterns

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Abstract

Integrating AFM technology into an SEM enables the interactive assembling of individual nanoparticles by in-situ pick-and-place handling. We present a hardware setup and introduce examples for the nanofabrication of plasmonic patterns.

© 2014 Optical Society of America

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