Fabrication of Gratings with Low Spacing Error by the Dual-Beam Exposure System with Spherical Lens

Shiwei Wang; Lijiang Zeng

doi:10.1364/CLEO_AT.2015.JTh2A.104

CLEO: 2015
OSA Technical Digest (online) (Optica Publishing Group, 2015),
paper JTh2A.104
•https://doi.org/10.1364/CLEO_AT.2015.JTh2A.104

Fabrication of Gratings with Low Spacing Error by the Dual-Beam Exposure System with Spherical Lens

Shiwei Wang and Lijiang Zeng

CLEO: Science and Innovations 2015

San Jose, California United States
10–15 May 2015
ISBN: 978-1-55752-968-8

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Poster Session Thursday (JTh2A)

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S. Wang and L. Zeng, "Fabrication of Gratings with Low Spacing Error by the Dual-Beam Exposure System with Spherical Lens," in CLEO: 2015, OSA Technical Digest (online) (Optica Publishing Group, 2015), paper JTh2A.104.

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Abstract

We propose a feedback method of adjusting the dual-beam exposure system with spherical collimation lenses based on deducing the spacing error from diffraction wavefront. The grating of 0.03 λ in 70×70 mm² can be achieved.

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