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Conferences > CLEO_SI > 2015 > JTu5A > JTu5A.54

Triple Metal-Film Subwavelength Gratings on Both Sides of a Silicon Substrate for Mid-Infrared polarizers

K. Shiraishi, S. Higuchi, H. Kakinuma, J. Shimizu, H. Yoda, and H. Ohno

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Abstract

Triple thin metal-film subwavelength gratings on both sides of a silicon substrate are fabricated for polarizers in the mid-infrared wavelength region of 10-20 |am. Measured TE-wave losses are higher than 30dB for the wavelength range, while the TM-wave losses are lower than 2.0dB in the wavelength range of 16.5–19.5μm.

© 2015 Optical Society of America

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