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Heterogeneous 2D and 3D Photonic Integration for Future Chip-Scale Microsystems

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This tutorial reviews state-of-the-art heterogeneous 2D/3D photonic integration technologies involving various novel fabrication techniques leading to realization of chip-scale microsystems with photonic-electronic-integrated-circuits. Future prospects and challenges in computing and networking applications will also be discussed.

© 2015 Optical Society of America

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