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Conferences > CLEO_SI > 2015 > STh3G > STh3G.5

Photonic Damascence Process for high-Q SiN Microresonator Fabrication for Nonlinear Photonics

M.H.P. Pfeiffer, A. Kordts, V. Brasch, C. Lecaplain, J.D. Jost, M. Geiselmann, and T.J. Kippenberg

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Abstract

Integrated microresonators based on SiN waveguides are an attractive platform for nonlinear optics. Here we present a new photonic Damascene fabrication process that solves common problems in SiN waveguide fabrication and demonstrate frequency comb formation.

© 2015 Optical Society of America

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