Author Affiliations

Uwe Bog,^*,1,2 Falko Brinkmann,¹ Sentayehu Fetene Wondimu,² Tobias Wienhold,² Sarah Kraemmer,³ Christian Koos,^2,4 Heinz Kalt,³ Sebastian Koeber,^2,4 Timo Mappes,^2,5 Michael Hirtz,¹ and Harald Fuchs^1,6

¹Institute of Nanotechnology (INT) and Karlsruhe Nano Micro Facility (KNMF), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany

²Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany

³Institute of Applied Physics (APH), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany

⁴Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany

⁵Carl Zeiss AG, Corporate Research and Technology, 07745 Jena, Germany

⁶Physikalisches Institut & Center for Nanotechnology (CeNTech), Westfälische Wilhelms-Universität, 48149 Münster, Germany

^*Corresponding author: uwe.bog@kit.edu