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193nm Lithography Fabricated High Sensitivity Photonic Crystal Microcavity Biosensors for Plasma Protein Detection in Patients with Pancreatic Cancer

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Abstract

High sensitivity L13-type two-dimensional photonic crystal microcavities with nanoholes were fabricated by 193nm photolithography. 0.03 picomolar concentration pancreatic cancer biomarker in patient serum samples was experimentally detected to 10× lower dilution than ELISA.

© 2015 Optical Society of America

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