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Fabrication of complex three-dimensional metallic microstructures based on femtosecond laser micromachining

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Abstract

The fabrication of complex metallic microstructures based on femtosecond laser micromachining and metal microsolidify process is demonstrated. This method is beneficial for building complex embedded 3D metal microstructures, electronic components, and hybrid electronic–microfluidic devices.

© 2015 Optical Society of America

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