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High-speed Energy-efficient Silicon-polymer Hybrid Integrated Slot Photonic Crystal Waveguide Modulator

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Abstract

We present a high-performance silicon-polymer hybrid integrated slot photonic crystal waveguide modulator. A record-high effective in-device r33 of 1230pm/V, Vπ×L of 0.282V×mm, 3-dB bandwidth of 15GHz, and energy consumption of 94.4fJ/bit are experimentally demonstrated.

© 2015 Optical Society of America

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