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Conferences > CLEO_SI > 2016 > SF1P > SF1P.1

Tensile-Strained Ge/SiGe Quantum-Well Microdisks with overlying SiNx Stressors

Ming-Yen Kao, Xiaochi Chen, Yijie Huo, Colleen Shang, Muyu Xue, Kai Zang, Ching-Ying Lu, Edward T. Fei, Yusi Chen, Theodore I. Kamins, and James S. Harris

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Abstract

We demonstrate Ge/SiGe multiple-quantum-well microdisks on Si substrates with SiNx stressors on top. The strain transferred from the SiNx to the Ge quantum wells are determined by photoluminescence and Raman measurements, and are in agreement with simulation results.

© 2016 Optical Society of America

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