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Conferences > CLEO_SI > 2016 > SM4R > SM4R.5

Ar Implantation-Induced Quantum Dot Intermixing Technique for 1550 nm-Band Highly Stacked QD Photonic Integrated Circuit

A. Matsumoto, Y. Takei, K. Akahane, S. Matsui, T. Umezawa, N. Yamamoto, Y. Matsushima, and K. Utaka

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Abstract

We studied an Ar-implantation-induced quantum dot intermixing (QDI) technique and its physical mechanism, and demonstrate an almost equal performance of the QDI used 120 nm shifted laser diode compared to the performance without the technique.

© 2016 Optical Society of America

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