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Conferences > CLEO_SI > 2016 > STh3Q > STh3Q.4

Femtosecond Laser Quantized Structuring in thin SiOx Film

Stephen Ho, Matthias Domke, David Roper, Heinz P. Huber, and Peter R. Herman

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Abstract

Time dynamics of thin plasma disk generation and ablation dynamics in SiOx film on silicon are examined by femtosecond laser pump and probe experiments. Quantized etching, nanovoids and blisters are revealed on half-wavelength interference period.

© 2016 Optical Society of America

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