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Low-Loss Air-Clad Suspended Silicon Platform for Mid-Infrared Photonics

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Abstract

We demonstrate a low-loss fully-air-clad suspended silicon platform for mid-infrared photonics. We fabricate a suspended microring resonator with a high quality factor of 83,000 at 3.79 μm wavelength and suspended nanotapers using etchless waveguide processing.

© 2016 Optical Society of America

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