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CMOS-compatible Silicon-Rich Nitride Waveguides for Ultrafast Nonlinear Signal Processing

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Abstract

We report on the linear and nonlinear characterization of PECVD Si-rich-nitride-waveguides. We show that the nonlinear properties can be enhanced by one order of magnitude with respect to standard Si3N4 in the 1550-nm-region without suffering two-photon-absorption.

© 2016 Optical Society of America

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