Abstract
Multiphoton Lithography is a technique that allows the fabrication of three-dimensional structures with sub-100 nm resolution. It is based on multi-photon absorption; when the beam of an ultra-fast laser is tightly focused into the volume of a transparent, photosensitive material, polymerization can be initiated by non-linear absorption within the focal volume. By moving the laser focus three-dimensionally through the material, 3D structures can be fabricated. The technique has been implemented with a variety of materials and several components and devices have been fabricated such as photonic crystals (Fig. 1a), biomedical devices (Fig. 1b), and microscopic models (Fig. 1c).
© 2016 Optical Society of America
PDF ArticleMore Like This
Aleksandr Ovsianikov and Boris N. Chichkov
JWB4 Conference on Lasers and Electro-Optics (CLEO:S&I) 2007
Carsten Reinhardt, Konstantina Terzaki, Arune Gaidukeviciute, Anastasia Giakoumaki, Vasilia Melissinaki, Andreas Seidel, Ralf Wilhelm, Roman Kiyan, Maria Vamvakaki, Maria Farsari, Costas Fotakis, and Boris N. Chichkov
CK4_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2009
Anadi Mukherjee
MJ9 OSA Annual Meeting (FIO) 1992