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Conferences > CLEO_SI > 2017 > SM1M > SM1M.6

Enhanced Effective Second-order Nonlinearities in Si-rich SiNx Thin Films

Hung-Hsi Lin, Rajat Sharma, Mu-Han Yang, Matthew W. Puckett, Christian D. Wurm, Felipe Vallini, and Yeshaiahu Fainman

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Abstract

We develop Si-rich SiNx thin films exhibiting large effective second-order nonlinearity (χ(2)) as high as 22.7 pm/V by combining the nonlinear contribution from pre-existing χ(2) in SiNx and from the electric-field induced second-harmonic (EFISH) effect.

© 2017 Optical Society of America

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