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Towards Ultra-High Q Microresonators in High-Index Contrast AlGaAs-On-Insulator

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Abstract

We demonstrate an AlGaAs-on-insulator microresonator with intrinsic Q as high as 690,000. We optimized the fabrication and investigated the impact of waveguide dimension on the Q in such a high-index contrast platform.

© 2017 Optical Society of America

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