Author Affiliations

Yongzheng Wen,^1,3 Delin Jia,¹ Wei Ma,¹ Yun Feng,² Ming Liu,² Liquan Dong,² Yuejin Zhao,^2,* and Xiaomei Yu^1,*

¹National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, China

²Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology, School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China

³State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China

^*Corresponding author: yuxm@pku.edu.cn, yjzhao@bit.edu.cn