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Hybrid Silicon / Lithium Niobate Waveguide Micro-chips Stable to 300°C

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Abstract

Bonded silicon-on-insulator and lithium niobate-on-insulator dies are shown to be thermally stable up to 300°C over a 67.2 mm2 bonded area. Optical propagation through a waveguide on this bonded hybrid silicon-lithium niobate platform is performed.

© 2017 Optical Society of America

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