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Conferences > CLEO_SI > 2017 > SM3K > SM3K.4

Laser Annealing of Low Temperature Deposited Silicon Waveguides

Y. Franz, A. F. J. Runge, S. Z. Oo, N. Healy, G. Martinez-Jimenez, A. Z. Khokhar, A. Tarazona, H. M. H. Chong, S. Mailis, and A. C. Peacock

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Abstract

We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.

© 2017 Optical Society of America

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