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Optical Properties of Ultrathin Plasmonic TiN Films

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Abstract

Epitaxial, ultrathin (<10 nm) plasmonic TiN films are characterized using spectroscopic ellipsometry and Hall measurements. Thin films with thicknesses down to 2 nm remain highly metallic with a carrier concentration on the order of 1022 cm−3.

© 2017 Optical Society of America

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