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Conferences > CLEO_SI > 2017 > STh1M > STh1M.2

1×256 Multi-layer, low-loss, Si3N4 waveguide optical phased arrays with 0.050° Instantaneous-Field-of-View

Chuan Qin, Kuanping Shang, Shaoqi Feng, Gengchen Liu, Guangyao Liu, Shibnath Pathak, and S. J. Ben Yoo

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Abstract

We report multilayer 1×256 Si3N4 optical phased arrays with 8-stage multimode interferometer (MMI) tree. The device shows 4.5 µm mode size, 3 dB excess loss and far field pattern with 0.050° beam width.

© 2017 Optical Society of America

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