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128×128 Silicon Photonic MEMS Switch with Scalable Row/Column Addressing

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Abstract

128×128 silicon photonic switch with 16,384 MEMS-actuated switching elements and row/column addressing scheme have been successfully integrated on a 16×17mm2 chip. The maximum (minimum) on-chip loss is 22.7 dB (4.8 dB).

© 2018 The Author(s)

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