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An Aluminum Nitride Integrated Photonics Platform for the Ultraviolet to Visible Spectrum

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Abstract

We demonstrate a wide-bandgap semiconductor photonics platform based on aluminum nitride on sapphire. We measure ring resonators with quality factor >140,000 at 638 nm and >20,000 down to 369 nm, which shows a promising path for low-loss integrated photonics in the ultraviolet and visible spectrum.

© 2018 The Author(s)

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