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GaP-On-Insulator as a Platform for Integrated Photonics

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Abstract

We present a complete process flow for fabrication of integrated GaP-on-insulator photonic devices via direct wafer bonding of epitaxial films. High-fidelity patterning enables a range of applications, such as waveguide resonators and photonic crystal cavities.

© 2018 The Author(s)

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