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Theoretical and experimental analysis on Ar Implantation-Induced Quantum Dot Intermixing for 1550 nm-Band Photonic Integrated Circuit

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Abstract

In this study, we theoretically and experimentally investigated an Ar ion implantation-induced quantum dot intermixing and its physical mechanism using photoluminescence and numerical simulations for the QD based monolithic PICs.

© 2019 The Author(s)

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