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Ring Resonator Based Ultrasound Detection in a Zero-Change Advanced CMOS-SOI Process

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Abstract

Optical ultrasound detection using microring resonators (MRRs) in a zero-change 45nm CMOS-SOI electronic-photonic platform with high intrinsic sensitivity of 39.6 f m/kPa and frequency response of 6MHz is reported.

© 2019 The Author(s)

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