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High Tolerance of Metamaterial Waveguides to Fabrication Variations

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Abstract

We demonstrate that silicon metamaterial waveguides have a high tolerance to large fabrication variations. We measured only a 5% drop in the Quality factor of a resonator with a metamaterial segment compared to a 40% drop for a wire waveguide segment, with a 50 nm discontinuity.

© 2019 The Author(s)

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