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Waveguide-Coupled Disk Resonators on a Crack-Free Si3N4 Film with a Dense Stress Release Pattern

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We deposit a crack-free 780nm-thick Si3N4 film on a dense stress release pattern on a 100mm silicon wafer. Our fabricated waveguide-coupled 920µm-radius Si3N4 disk resonator reveals a high loaded quality factor of 1.7×106.

© 2019 The Author(s)

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