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Metasurface-based Waveplates Demonstrated on 300 mm Si CMOS Platform

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Abstract

Metasurface-based all-Si waveplates are first demonstrated on 300 mm CMOS platform. The cross- and co-polarization transmittances are characterized. A polarization conversion efficiency of 87% is achieved near 1.6 μm-wavelength.

© 2019 The Author(s)

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