Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Metasurface-based Waveplates Demonstrated on 300 mm Si CMOS Platform

Not Accessible

Your library or personal account may give you access


Metasurface-based all-Si waveplates are first demonstrated on 300 mm CMOS platform. The cross- and co-polarization transmittances are characterized. A polarization conversion efficiency of 87% is achieved near 1.6 μm-wavelength.

© 2019 The Author(s)

PDF Article
More Like This
CMOS-Compatible Metasurface-based Subtractive Color Filters on a 300-mm Glass Wafer

Zhengji Xu, Nanxi Li, Yuan Dong, Ting Hu, Qize Zhong, Wei Kang, Yanyan Zhou, Dongdong Li, Yuan Hsing Fu, Qunying Lin, Shiyang Zhu, and Navab Singh
JTu2B.28 CLEO: Applications and Technology (CLEO_AT) 2020

Metasurface Manufacturing on 300-mm Wafer Platforms

Nanxi Li, Zhengji Xu, Yuan Dong, Ting Hu, Qize Zhong, Yuan Hsing Fu, Shiyang Zhu, and Navab Singh
SF1J.6 CLEO: Science and Innovations (CLEO_SI) 2020

Embedded dielectric metasurface based subtractive color filter on a 300mm glass wafer

Zhengji Xu, Yuan Dong, Yuan Hsing Fu, Qize Zhong, Ting Hu, Dongdong Li, Yu Li, Nanxi Li, Ying Lin, Qunying Lin, Shiyang Zhu, and Navab Singh
STh1O.4 CLEO: Science and Innovations (CLEO_SI) 2019


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription

Select as filters

Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved