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Carbon Dioxide Sensing with Low-confinement High-sensitivity Mid-IR Silicon Waveguides

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Abstract

We present a low-confinement Si waveguide for 4.26 μm wavelength and apply it to sense CO2 concentrations down to 0.1 %. We demonstrate the highest reported waveguide sensitivity to CO2: 44% of the free-space sensitivity

© 2019 The Author(s)

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