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Waveguide-Enhanced Raman Spectroscopy Using a Mesoporous Silica Sorbent Layer for Volatile Organic Compound (VOC) Sensing

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Abstract

We report a Raman sensor for broadband vapor-phase volatile organic compounds (VOCs) based on SiN waveguides functionalized with a mesoporous silica top-cladding. A detection limit below 1000ppm is demonstrated and scaling to trace-gas-levels is discussed.

© 2019 The Author(s)

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