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Low-back-reflection grating coupler on silicon-on- insulator for on-chip gyroscope application

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Abstract

To achieve optical access between silicon gyroscope chip and fiber sensing coil, we experimentally demonstrate grating coupler with asymmetric trenches on silicon-on-insulator with -4 dB coupling efficiency, 40.5 nm bandwidth, and -32.9 dB interface reflection.

© 2020 The Author(s)

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