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Conferences > CLEO_SI > 2020 > SF2N > SF2N.7

Single nanoparticle detection with CMOS-compatible heterodyne interferometry

Ming Jin, Shui-Jing Tang, Hao-Wen Shu, Yuan-Sheng Tao, Xing-Jun Wang, and Yun-Feng Xiao

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Abstract

We introduce a CMOS-compatible waveguide interferometry for single nanoparticle detection using optical dark-field scattering and heterodyne technique. The integrated sensor is capable of detecting single 40-nm-radius nanoparticles with a signal-to-noise ratio of 13 dB.

© 2020 The Author(s)

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