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Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

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MEMS offer low power tunability to silicon photonics. However, reported phase shifters lack in range, IL, or linearity. We show n linear phase shift in compact, 0.2 dB-IL MEMS devices, and demonstrate trade-offs for scalability.

© 2020 The Author(s)

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