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Conferences > CLEO_SI > 2020 > STh1F > STh1F.1

Low-loss Thin Film Lithium Niobate Bonded on Silicon Nitride Waveguides

Siddhartha Ghosh, Siva Yegnanarayanan, Matthew Ricci, Dave Kharas, and Paul Juodawlkis

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Abstract

We demonstrate heterogeneous integration of thin film LiNbO3 on SÌ3N4 photonic integrated circuits with SiO2, AI2O3 and direct bonding. We report record low losses in bonded ring resonators of 0.4 dB/cm (intrinsic Q = 8.19x105).

© 2020 The Author(s)

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