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Conferences > CLEO_SI > 2020 > STh3O > STh3O.6

Graphene-assisted electro-optomechanical integration on a silicon-on-insulator platform

Xiang Xi, Zefeng Chen, Jian-Bin Xu, and Xiankai Sun

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Abstract

We demonstrated for the first time graphene-assisted electro-optomechanical integration on a silicon-on-insulator platform. Various mechanical modes were effectively actuated with mechanical Q as high as ~1000 measured in air.

© 2020 The Author(s)

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