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Conferences > CLEO_SI > 2020 > STu3O > STu3O.5

Active-passive Integration on III-V-OI Platform using Quantum Well Intermixing

Naoki Sekine, Kasidit Toprasertpong, Shinichi Takagi, and Mitsuru Takenaka

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Abstract

We investigated quantum well intermixing for III-V on insulator platform to achieve active-passive integration. Owing to P2 implantation into multi quantum well, we monolithically integrated passive waveguide and waveguide photodetector with responsivity of 0.4 A/W.

© 2020 The Author(s)

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