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High-Q Nanomechanical Resonators for Optomechanical Sensing Beyond the Standard Quantum Limit

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Abstract

We fabricate high-stress silicon and silicon-nitride based nanomechanical string resonators to study quantum optomechanical interactions. We use phononic bandgap engineering techniques to minimize mechanical energy dissipation in the out-of-plane defect mode of the resonator.

© 2020 The Author(s)

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