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Conferences > CLEO_SI > 2021 > JTh3A > JTh3A.50

Fabrication of polymeric grating layers and their integration into optoelectronic devices using dip-pen nanolithography

Moshe Zohar, Roy Avrahamy, Benny Milgrom, Zeev Fradkin, and Mark Auslender

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Abstract

Two-dimensional optical nanostructures grating based on polymers were fabricated using dip-pen nanolithography. We investigated the influence of both the ink composition and dwell-time. Prototypes of phase masks were manufactured, and their main characteristics were analyzed.

© 2021 The Author(s)

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