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Hybrid Aluminum Nitride Integration on Silicon Nitride Photonic Circuits

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Abstract

We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quan-tum optics experiments.

© 2021 The Author(s)

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